Imaging and Resist Technologies for the Micromachining Industry
نویسنده
چکیده
The major steps in the pattern transfer process will be identified and used to explain the individual aspects of the challenges involved with high aspect ratio and high topography. The structural perspective of micromachined devices will then be introduced as a foundation for identifying the high aspect ratio and high topography challenges. These two key photolithography challenges will then be discussed.
منابع مشابه
Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography
Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the ...
متن کاملDry Etching Based Silicon Micromachining
The aim of this work is to demonstrate the “dry” etching based micro-fabrication technologies in the manufacturing of Single Crystal Silicon (SCS) for Micro-Electro/(Optical)-Mechanical-Systems (ME(O)MS). The ME(O)MS technology is very fast growing industry branch based often on the same silicon technology as integrated circuits. The process of plasma-dry etching is quite simple straightforward...
متن کاملDevelopment of Ga-67 Maltolate Complex as an Imaging Agent
Due to the antitumor activity of Gallium MAL complex, as well as recent findings on new targeted biomolecules in malignant cells through this complex, the development of radiolabeled gallium complex for future imaging studies was targeted. Ga-67 labeled 3-hydroxy-2-methyl-4H-pyran-4-onate (Ga-67 MAL) was prepared using freshly prepared Ga-67 chloride and 3-hydroxy-2-methyl-4H-pyran-4-onate in a...
متن کاملDevelopment of Ga-67 Maltolate Complex as an Imaging Agent
Due to the antitumor activity of Gallium MAL complex, as well as recent findings on new targeted biomolecules in malignant cells through this complex, the development of radiolabeled gallium complex for future imaging studies was targeted. Ga-67 labeled 3-hydroxy-2-methyl-4H-pyran-4-onate (Ga-67 MAL) was prepared using freshly prepared Ga-67 chloride and 3-hydroxy-2-methyl-4H-pyran-4-onate in a...
متن کاملStrategic Technology Planning in Science-Based Subsectors of Petroleum Industry: The Case Study of R&D Roadmapping for Geochemical Exploration Technologies
Strategic planning of technology in Iran's oil industry has a long history, however, the knowledge-based sectors of the oil industry, despite their different characteristics, have been less exposed to such experiences, and hence the study of the experience in one of the key sub-sectors of this industry, namely the exploration geochemical sector, can be innovative. This article seeks to answer t...
متن کامل